Description of HiPIMS plasma regimes in terms of composition, spoke formation and deposition rate

作者：de los Arcos Teresa^*; Schroeder Raphael; Gonzalvo Yolanda Aranda; Schulz von der Gathen Volker; Winter Joerg

来源：Plasma Sources Science and Technology, 2014, 23(5): 054008.

DOI：10.1088/0963-0252/23/5/054008

• high power impulse magnetron sputtering
• energy-resolved mass spectrometry
• optical emission spectroscopy

The behaviour of Cu and Cr HiPIMS (high power impulse magnetron sputtering) discharges was investigated by a combination of optical emission spectroscopy, energy-resolved mass spectrometry and optical imaging, for the complete current-voltage characteristic range achievable within our experimental conditions. Inflection points typical of HiPIMS current-voltage characteristics separate plasma regimes perfectly differentiated in terms of flux composition of species towards the substrate, deposition rate, and the nature of plasma self-organization. The reorganization of the HiPIMS plasma into spokes (areas of high ionization over the target) is associated to one regime of high plasma conductivity, where also deposition rate is limited. This spoke-dominated regime can be substituted by a homogeneous regime at higher powers, where there is an increase of deposition rate, which is driven mostly by an increase in the flux of metal neutrals and metal double-charged ions. The relevance of secondary electron emission mechanisms for the support of the spoke-dominated regime in reactive and non-reactive sputtering conditions is discussed.

• 出版日期2014-10