Atom probe tomography analysis of different modes of Sb intermixing in GaSb quantum dots and wells

作者:Martin Andrew J*; Hunter Allen H; Saucer Timothy W; Sih Vanessa; Marquis Emmanuelle A; Millunchick Joanna
来源:Applied Physics Letters, 2013, 103(12): 122102.
DOI:10.1063/1.4821549

摘要

Different modes of intermixing are observed in GaSb/GaAs layers via atom probe tomography. The intermixing length scale for quantum wells of varying thickness is on the order of a monolayer, but three times longer for the wetting layer of a quantum dot structure. The former arises from segregation of Sb and/or surface-induced intermixing via detachment from step edges. The latter is dominated by surface-induced intermixing due to disintegration of the GaSb dots upon capping.

  • 出版日期2013-9-16