A highly sensitive pressure sensor using a Au-patterned polydimethylsiloxane membrane for biosensing applications

作者：Liu Xinchuan^*; Zhu Yihao; Nomani Md W; Wen Xuejun; Hsia Tain Yen; Koley Goutam

来源：Journal of Micromechanics and Microengineering, 2013, 23(2): 025022.

DOI：10.1088/0960-1317/23/2/025022

We report on the fabrication and characterization of a highly sensitive pressure sensor using a Au film patterned on a polydimethylsiloxane (PDMS) membrane. The strain-induced change in the film resistance was utilized to perform the quantitative measurement of absolute pressure. The highest sensitivity obtained for a 200 mu m thick PDMS film sensor was 0.23/KPa with a range of 50 mm Hg, which is the best result reported so far, over that range, for any pressure sensor on a flexible membrane. The noise-limited pressure resolution was found to be 0.9 Pa (0.007 mm Hg), and a response time of similar to 200 ms, are the best reported results for these sensors. The ultrahigh sensitivity is attributed to the strain-induced formation of microcracks, the effect of which on the resistance change was found to be highly reversible within a certain pressure range. A physical model correlating the sensitivity with the sensor parameters and crack geometry has been proposed.

• 出版日期2013-2