A non-resonant fiber scanner based on an electrothermally-actuated MEMS stage

作者：Zhang Xiaoyang^*; Duan Can; Liu Lin; Li Xingde; Xie Huikai

来源：Sensors and Actuators A: Physical , 2015, 233: 239-245.

DOI：10.1016/j.sna.2015.07.001

• Distal fiber scanning
• Fiber scanner
• Electrothermal actuation
• Microactuator
• MEMS stage
• Micro-platform
• Large range

Scanning fiber tips provides the most convenient way for forward-viewing fiber-optic microendoscopy. In this paper, a distal fiber scanning method based on a large-displacement MEMS actuator is presented. A single-mode fiber is glued on the micro-platform of an electrothermal MEMS stage to realize large range non-resonant scanning. The micro-platform has a large piston scan range of up to 800 pm at only 6 V. The tip deflection of the fiber can be further amplified by placing the MEMS stage at a proper location along the fiber. A quasi-static model of the fiber-MEMS assembly has been developed and validated experimentally. The frequency response has also been studied and measured. A fiber tip deflection of up to 1650 mu m for the 45 mm-long movable fiber portion has been achieved when the MEMS electrothermal stage was placed 25 mm away from the free end. The electrothermally-actuated MEMS stage shows a great potential for forward viewing fiber scanning and optical applications.

• 出版日期2015-9-1