科研之友
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摘要
A novel magnetorheological finishing (MRF) method, which is named Lap-MRF, is proposed in this paper. The magnetorheological fluid (MR fluid) in the polishing zones can be renewed continuously so that the determinacy is ensured. A lap, instead of a large polishing wheel, is used to expand the polishing area, which improves the material removal rate largely. Lap-MRF uses flexible MR fluid as polishing pad to match the surface well. Moreover, the polishing pad executes planetary motion so as to obtain smooth surface. In this paper, the principle of Lap-MRF and the theoretical model of material removal rate are presented. Using the finite element analysis method, the permanent magnet unit is simulated and a multi-parameter optimization is conducted to improve the performance of Lap-MRF. Finally, a series of polishing experiments and simulation process are carried out. For K9 sample, the volume removal rate is up to 0.76 mm(3)/min and its relative change rate is less than 5.5%. For silicon modification layer sample, the surface roughness is improved to 0.788 nm RMS (root mean square) from 1.610 nm RMS. There is no deep pit and the polishing ripple is not apparent on the surface. For I broken vertical bar 1000 mm flat mirror, the convergence efficiency of simulation process is up to 97.2%. These results verify the validity of the proposed method, which makes Lap-MRF to be a promising finishing technology for large aperture mirrors.
- 出版日期2018-4
- 单位中国人民解放军国防科学技术大学
