Microorganisms for MEMS

作者：Xiong Xiaorong^*; Lidstrom Mary E; Parviz Babak A

来源：Journal of Microelectromechanical Systems, 2007, 16(2): 429-444.

DOI：10.1109/JMEMS.2006.885851

• biotic-MEMS
• functional structure
• integrated system
• material synthesis
• sensors and actuators
• uni- and multicellular microorganisms

Uni- and multicellular microorganisms are capable of performing a variety of functions. Many of these self-replicating biological entities can synthesize and structure materials, sense, convert energy, communicate, and generate mechanical motion. From an engineering vantage point, these microorganisms may be considered as functional systems that can further the state-of-the-art in microelectromechanical system microfabrication technology and device function. Microorganisms can synthesize a wide range of inorganics at room temperature in aqueous environment, can form nanoscale objects with resolutions beyond the capabilities of conventional photolithography, and can be used to construct highly target-specific chemical and biological sensors among other applications. In this paper we consider the unique opportunities offered by microorganisms-when used to complement a microfabrication process or used as an integral part of a microelectromechanical system-in inorganic material synthesis, in formation of structures, and in transduction. We catalog many of the microorganisms that can be potentially used in this fashion and under each category discuss the specifics of a few model microorganisms. Our goal is to discuss the pros and cons of integration of microorganisms and microelectromechanical system technology and provide a reference point for researchers in this promising area.

• 出版日期2007-4