As-grown textured zinc oxide films by ion beam treatment and magnetron sputtering

作者：Zhang Wendi^*; Bunte Eerke; Ruske Florian; Koehl Dominik; Besmehn Astrid; Worbs Janine; Siekmann Hilde; Kirchhoff Joachim; Gordijn Aad; Huepkes Juergen

来源：Thin Solid Films, 2012, 520(12): 4208-4213.

DOI：10.1016/j.tsf.2011.04.098

• Ion beam treatment
• Magnetron sputtering
• ZnO:Al films
• TCO
• Solar cells

This work presents as-grown textured ZnO:Al films by rf magnetron sputtering initiated by pre-treatment of glass substrate with mixed argon and oxygen ions. A 650 nm thick of this film exhibits surface texture features with lateral size around 500 nm; the resistivity is below 5 x 10(-4) Omega . cm and the transparency in the near-infrared spectral range is high (%26gt;80% at 1000 nm). Microcrystalline silicon thin film solar cells grown on the textured glass exhibit excellent light trapping effect with a short circuit current density of 18.2 mA/cm(2).

• 出版日期2012-4-2