科研之友
微信
新浪微博
Facebook
分享链接
摘要
Superjunction has arguably been the most creative and important concept in power device field. -Superjunction vertical diffused MOSFET (SJ VDMOS) has been commercialized and the research effort to lower the on-resistance for SJ VDMOS continues. This review is to summarize the development of SJ VDMOS structures and fabrication from the point of view of minimizing the on-resistance to below the Si limit. Finally, the future work what researchers can do on the SJ VDMOS also has been presented.
- 出版日期2012-2
- 单位东南大学
