Size-effects on the optical properties of zirconium oxide thin films

作者：Ramana C V^*; Vemuri R S; Fernandez I; Campbell A L

来源：Applied Physics Letters, 2009, 95(23): 231905.

DOI：10.1063/1.3271697

Zirconium oxide (ZrO(2)) thin films with an average crystallite-size (L) ranging from 5 to 25 nm were grown by sputter deposition onto optical grade quartz substrates. The optical properties of grown ZrO(2) films were evaluated using optical transmission and reflectance spectroscopic measurements. The size-effects were significant on the optical characteristics of ZrO(2) films. The bandgap energy (E(g)) was found to increase from 5.78 to 6.07 eV with decreasing L values from 20 to 7 nm. A direct, linear inverse L-E(g) relationship found for ZrO(2) films suggest that tuning optical properties for desired applications can be achieved by controlling the size.

• 出版日期2009-12-7