Migration of indium ions in amorphous indium-gallium-zinc-oxide thin film transistors

作者：Kang Jiyeon; Moon Kyeong Ju; Lee Tae Il; Lee Woong; Myoung Jae Min^*

来源：Applied Surface Science, 2012, 258(8): 3509-3512.

DOI：10.1016/j.apsusc.2011.11.104

• Thin film transistors
• Indium compounds
• Electromigration
• Amorphous semiconductors

Electromigration of In in amorphous indium-gallium-zinc-oxide thin film transistors under repeated switching operation was investigated by analyzing the distribution of component elements. During the repeated switching operations up to 300 times, threshold voltage of this device increased gradually implying alteration to the internal device structures. Energy dispersive X-ray spectroscopy revealed noticeable redistribution of metallic components, especially In, in the channel layer beneath the source electrode during switching operations by the migration of metallic ions away from the source electrode, which is attributed to electromigrations similar to those observed in organic light emitting diodes having indium tin oxide electrodes.

• 出版日期2012-2-1