A radiation imaging, detector made by postprocessing a standard CMOS chip

作者：Carballo Victor Manuel Blanco^*; Chefdeville Maximilien; Fransen Martin; van der Graaf Harry; Melai Joost; Salm Cora; Schmitz Jurriaan; Timmermans Jan

来源：IEEE Electron Device Letters, 2008, 29(6): 585-587.

DOI：10.1109/LED.2008.925649

• microsensors
• nuclear imaging
• radiation detectors
• SU-8
• wafer postprocessing
• wafer-scale integration

An unpackaged microchip is used as the sensing element in a miniaturized gaseous proportional chamber. This letter reports on the fabrication and performance of a complete radiation imaging detector based on this principle. Our fabrication schemes are based on wafer-scale and chip-scale postprocessing. Compared to hybrid-assembled gaseous detectors, our microsystem shows superior alignment precision and energy resolution, and offers the capability to unambiguously reconstruct 3-D radiation tracks on the spot.

• 出版日期2008-6