Application of the van der Pauw method for samples with holes

作者：Oh Donggeon^*; Ahn Cheongeung; Kim Minchul; Park Eung Kyu; Kim Yong Sang

来源：Measurement Science and Technology, 2016, 27(12): 125001.

DOI：10.1088/0957-0233/27/12/125001

• van der Pauw method
• conformal mapping
• resistivity measurement
• defects

Modifications of the original van der Pauw relation were suggested recently. The methods are applicable to samples with a hole, unlike the original van der Pauw relation, but it takes too much time and effort to apply the methods to samples with high randomness. So in this paper we suggest two generalizations of the van der Pauw method which are applicable for two-dimensional homogeneous systems with a finite number of holes. Both methods rely on obtaining a crucial constant of the system, nu. The first method involves setting the probes far from each other while conducting the experiment using a sample with a small hole, approximating a relation that gives. as a linear function of the area ratio of the hole only. The second method produces an identical sample of known resistivity and thickness to obtain., which is believed to be dependent on the geometrical properties only. Unlike the earlier methods, which entailed complex procedures, little in the way of measurements and computation is needed for the new methods. The methods will be very useful in electric experiments or industries which need to measure the resistivity of samples.

• 出版日期2016-12