Analysis of mechanical properties of N-2 in situ doped polycrystalline 3C-SiC thin films by chemical vapor deposition using single-precursor hexamethyildisilane

作者：Kim Kang San; Han Ki Bong; Chung Gwiy Sang^*

来源：Physica B: Condensed Matter , 2010, 405(2): 513-516.

DOI：10.1016/j.physb.2009.09.055

• Poly 3C-SiC
• Nano-indentor
• Young's modulus
• Hardness
• In situ doping

This paper describes the mechanical properties of poly (polycrystalline) 3C-SiC thin films with N-2 in situ doping. In this work, in situ doped poly 3C-SiC film was deposited by using the atmospheric pressure chemical vapor deposition (APCVD) method at 1200 degrees C using single-precursor hexamethyildisilane: Si-2(CH3)(6) (HMDS) as Si and C precursors, and 0 similar to 100 sccm N-2 as the dopant source gas. The mechanical properties of doped poly 3C-SiC thin films were measured by nano-indentation. Young's modulus and hardness were measured to be 285 and 35 GPa at 0 sccm N-2, respectively. Young's modulus and hardness decreased with increasing N-2 flow rate. Surface morphology was evaluated by atomic force microscopy (AFM) according to N-2 flow rate.

• 出版日期2010-1-15