A LINEAR LOW DRIVING VOLTAGE MEMS ACTUATOR WITH LARGE LATERAL STROKE DRIVEN BY LORENTZ FORCE

作者：Lv X D; Wei W W; Mao X; Yang J L^*; Yang F H

来源：18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015-06-21 to 2015-06-25.

• MEMS actuator
• Lorentz force
• large stroke
• linear control

This paper presents a novel MEMS actuator driven by Lorentz force. The actuator has a structure of folded beams, which is favorable for a large lateral stroke. A displacement of more than 47 ae m was achieved with a magnetic field of 0.3 T and the diving current of 8 mA. The actuator can generate a large displacement under a low driving voltage and can easily be integrated with CMOS circuits. Lorentz force is proportional to the magnetic field and the driving current, which results in a linear dependence of the lateral displacement on the diving current.

• 出版日期2015
• 单位中国科学院