Determination of neutral temperature using fiber Bragg grating sensor in capacitively coupled argon plasmas

作者：Han, Dao-Man; Liu, Zi-Geng; Liu, Yong-Xin^*; Zhang, Xin-Pu; Gao, Fei; Peng, Wei; Wang, You-Nian

来源：Journal of Applied Physics, 2016, 119(11): 113302.

DOI：10.1063/1.4943942

• ABATEMENT
• DENSITY

Neutral temperature T-g in capacitively coupled argon plasmas was measured by using a fiber Bragg grating sensor. The measurement of T-g is based on the thermal equilibrium process between the sensor and neutral gases, which is found to become fast upon increasing pressure, due to enhanced heat conduction. Additionally, T-g was found to increase with increasing high frequency power due to enhancive collisions with charged particles. It is also observed that T-g exhibits a significant gradient in space, ranging from 10 to 120 degrees C higher than room temperature for the conditions investigated. In addition, the spatial profiles of T-g at different pressures generally resemble those of the Ar+ density n(i), measured with a floating double probe. The neutral gas is mainly heated via elastic collisions with ions in the sheath region followed by heat conduction among neutrals.

• 出版日期2016-3-21
• 单位大连理工大学