Analysis of a MEMS gyroscope interface circuit

作者：Wang HQ^*; Jin ZH; Jiao JW; Wang YL

来源：7th International Conference on Solid-State and Integrated Circuits Technology, 2004-10-18 to 2004-10-21.

The interface circuit of a MEMS gyroscope is analyzed in this paper. The gyro works at atmospheric pressure, driven by electronic magnetic force, and sensed by capacitance. The equivalent models of the gyro and the circuits are set. The performance of the gyro system is analyzed and optimized with the model. As a result, the system performance is significantly improved. The gyro';s resolution reaches 0.05 degrees/s, with full scale value 150 degrees/s, scale factor 9.8mV/(degrees/s.). nonlinearity 0.43%, and bias drift 3.06 degrees/s /h.

• 出版日期2004
• 单位浙江大学