Deposition of Hexagonal Boron Nitride from N-Trimethylborazine (TMB) for Continuous CVD Coating of SiBNC Fibers

作者：Ye Yaping^*; Graupner Uta; Krueger Reinhard

来源：Chemical Vapor Deposition, 2012, 18(7-9): 249-255.

DOI：10.1002/cvde.201106969

• APCVD
• h-BN
• SiBNC fiber coating
• TMB

Bonding strength between fibers and matrices of ceramic matrix composites (CMCs) is of great importance for the fracture behavior and can be adjusted by appropriate fiber coatings. In this study, the continuous coating of SiBNC fibers with hexagonal boron nitride (h-BN) by CVD from TMB in an atmospheric pressure reactor is presented. Prior to fiber coating, the effects of deposition parameters, e.g., deposition temperature, concentration of the precursor and ammonia addition, and gas-flow rate are investigated on flat Si substrates, and the results are utilized for the fiber coating. Ammonia concentration has no influence on the deposition rate. A maximum deposition rate of 0.044?kg?m-2?h-1 for static conditions and 0.040?kg?m-2?h-1 for continuous conditions can be achieved, which is comparable to the literature. The depositions are characterized for their composition and structure. Smooth homogeneous coatings with a thickness of 180250?nm are found on the fibers. High-resolution transmission electron microscopy (HRTEM) of the coated SiBNC fibers reveals that the hexagonal BN with 5?nm basal planes is mainly randomly oriented.

• 出版日期2012-9