A cheap and quickly adaptable in situ electrical contacting TEM sample holder design

作者：Boerrnert Felix; Voigtlaender Ralf; Rellinghaus Bernd; Buechner Bernd; Ruemmeli Mark H; Lichte Hannes

来源：Ultramicroscopy, 2014, 139: 1-4.

DOI：10.1016/j.ultramic.2014.01.001

• In situ TEM
• TEM sample holder
• Electrical contacting

In situ electrical characterization of nanostructures inside a transmission electron microscope provides crucial insight into the mechanisms of functioning micro- and nano-electronic devices. For such in situ investigations specialized sample holders are necessary. A simple and affordable but flexible design is important, especially, when sample geometries change, a holder should be adaptable with minimum effort. Atomic resolution imaging is standard nowadays, so a sample holder must ensure this capability. A sample holder design for on-chip samples is presented that fulfils these requisites. On-chip sample devices have the advantage that they can be manufactured via standard fabrication routes.

• 出版日期2014-4