Neoclassical thermal conductivity in ICP plasma at low pressure

作者：Smirnov A R^*; Park W; Istomin Ya N; Kostomarov D P; Sheina E A; Shmlev A B; Volynets V N

来源：Journal of Plasma Physics, 2008, 74: 353-360.

DOI：10.1017/S0022377807006952

The plasma temperature in a new plasma source shows unusual behaviour at low pressures (about 1 mTorr) and high absorbed powers. In Ar plasma at pressures of about 1 mTorr, the electron temperature shows a pronounced maximum inside all electromagnetic accelerator, which is followed by a, rapid drop at the boundary between the accelerator region and the main chamber. In this paper a neoclassical thermo-conductivity model based on the analysis of the electron trajectories is proposed to describe the sharp electron temperature profile. Quantitative agreement of the calculated temperature profile with the experiment is observed.

• 出版日期2008-6