A Direct Visual Servoing Scheme for Automatic Nanopositioning

作者:Tamadazte Brahim*; Piat Nadine Le Fort; Marchand Eric
来源:IEEE/ASME Transactions on Mechatronics, 2012, 17(4): 728-736.
DOI:10.1109/TMECH.2011.2128878

摘要

This paper demonstrates an accurate nanopositioning scheme based on a direct visual servoing process. This technique uses only the pure image signal (photometric information) to design the visual servoing control law. With respect to traditional visual servoing approaches that use geometric visual features (points, lines ... ), the visual features used in the control law is the pixel intensity. The proposed approach has been tested in term of accuracy and robustness in several experimental conditions. The obtained results have demonstrated a good behavior of the control law and very good positioning accuracy. The obtained accuracies are 89 nm, 14 nm, and 0.001 degrees in the x-, y-, and theta-axes of a positioning platform, respectively.

  • 出版日期2012-8
  • 单位INRIA