Direct Growth of MoS2/h-BN Heterostructures via a Sulfide-Resistant Alloy

作者:Fu, Lei; Sun, Yangyong; Wu, Nian; Mendes, Rafael G.; Chen, Linfeng; Xu, Zhen; Zhang, Tao; Ruemmeli, Mark H.; Rellinghaus, Bernd; Pohl, Darius; Zhuang, Lin; Fu, Lei
来源:ACS Nano, 2016, 10(2): 2063-2070.
DOI:10.1021/acsnano.5b06254

摘要

Improved properties arise in transition metal dichalcogenide (TMDC) materials when they are stacked onto insulating hexagonal boron nitride (h-BN). Therefore, the scalable fabrication of TMDCs/h-BN heterostructures by direct chemical vapor deposition (CVD) growth is highly desirable. Unfortunately, to achieve this experimentally is challenging. Ideal substrates for h-BN growth, such as Ni, become sulfides during the synthesis process. This leads to the decomposition of the pregrown h-BN film, and thus no TMDCs/h-BN heterostructure forms. Here, we report a thoroughly direct CVD approach to obtain TMDCs/h-BN vertical heterostructures without any intermediate transfer steps. This is attributed to the use of a nickel-based alloy with excellent sulfide-resistant properties and a high catalytic activity for h-BN growth. The strategy enables the direct growth of single crystal MoS2 grains of up to 200 mu m(2) on h-BN, which is approximately 1 order of magnitude larger than that in previous reports. The direct band gap of our grown single-layer MoS2 on h-BN is 1.85 eV, which is quite close to that for freestanding exfoliated equivalents. This strategy is not limited to MoS2-based heterostructures and so allows the fabrication of a variety of TMDCs/h-BN heterostructures, suggesting the technique has promise for nanoelectronics and optoelectronic applications.