Development of Network Database System for Thermophysical Property Data of Thin Films

作者：Yamashita Yuichiro^*; Yagi Takashi; Baba Tetsuya

来源：Japanese Journal of Applied Physics, 2011, 50(11): 11RH03.

DOI：10.1143/JJAP.50.11RH03

The database system for thermophysical property data, which has been developed by the National Metrology Institute of Japan (NMIJ), is evolved to store comprehensive information on thin films. Since a thin film is identified by not only its constituent elements, phases, or compositions but also its method of synthesis, a strategy for storing all thin-film specimens is adopted when the data are measured by NMIJ. In addition, new criteria of material classification in our database are introduced to systematically manage material information on multilayer thin-film specimens. For example, when a multi layered film is measured by an ultrafast laser flash method, the database stores not only analyzed results but also data at various measurement stages, which can follow analysis steps from an observed signal data to derived results: thermal diffusivity and boundary thermal resistance of the film. In order to store new data items, the database system has been updated. The updated database system is demonstrated in terms of its storage of record items and its user interface using a set of thermophysical property data of a "TiN single-layer thin film on a synthesized quartz substrate", "Al2O3 coated with Mo three-layer thin films on a fused silica substrate", and "ITO coated with Mo three-layer thin films on a fused silica substrate". This database system is available at http://riodb.ibase.aist.go.jp/TPDB/DBGVsupport/index_en.html.

• 出版日期2011-11