Development of organic SIMS system with Ar-GCIB and IMS-4f

作者：Nojima Masashi; Suzuki Masato; Fujii Makiko; Seki Toshio^*; Matsuo Jiro

来源：Surface and Interface Analysis, 2014, 46(S1): 368-371.

DOI：10.1002/sia.5671

• Ar-GCIB
• dynamic
• IMS-4f

We have developed Ar-gas cluster ion beam (GCIB) dynamic secondary ion mass spectrometry system by introducing Ar-GCIB column to IMS-4f. Mass spectrums of arginine and polystyrene (PS) are obtained with typical fragment ions. Depth profiles of PS are obtained within 10nm depth resolutions. Secondary ion images of fine-patterned PS are observed within 10 mu m image resolutions.

• 出版日期2014-11