A plastic-based bolometer array sensor using carbon nanotubes for low-cost infrared imaging devices

作者：Narita Kaoru^*; Kuribayashi Ryosuke; Altintas Ersin; Someya Hiroko; Tsuda Kenichiro; Ohashi Keishi; Tabuchi Toru; Okubo Shuichi; Imazato Masaharu; Komatsubara Shigeyuki

来源：Sensors and Actuators A: Physical , 2013, 195: 142-147.

DOI：10.1016/j.sna.2013.03.008

• Infrared image sensor
• Bolometer
• Carbon nanotube

We have developed an infrared image sensor based on bolometers on a plastic substrate that is potentially ultra low-cost due to its simple structure consisting of mainly organic materials. The bolometer includes a thermal isolator made of a very low thermal conductive polymer (parylene) and a newly developed, highly sensitive (TCR <-2%/K) carbon nanotube thin film thermistor. Experiment results showed that the responsivity of our sensor was 138 V/W (at V-B = 2 V) and the estimated noise equivalent temperature difference (NETD) at room temperature was 1.1 K. The row-column type 64-pixel (8 x 8) array sensor was fabricated and evaluated while the image of a heat source was focused on the sensor array by a Ge lens. Utilizing the test readout circuit based on switching modules, we obtained the images of the heat source and confirmed the basic operation of IR imaging.

• 出版日期2013-6-1