A novel fabrication method for micro optical waveguide mold based on fly-cutting technology

作者：Wu, Yulie; Peng, Wenqiang^*; Liu, Yong

来源：Optik, 2013, 124(9): 867-869.

DOI：10.1016/j.ijleo.2012.02.020

• Waveguide mold
• Fly-cutting
• Injection molding
• Polymer waveguide

We present a novel fabrication method for micro optical waveguide mold based on fly-cutting technology. A micro polymer optical waveguide mold for molding process has been fabricated by ultra precision fly-cutting system. The mold, which has the trapezoidal cross-section with 65 mu m top width, 38 mu m bottom width and 56 pan height, has high depth-to-width ratio and high dimensional accuracy. The waveguide pattern on the mold has the clear sharp edge and smooth sidewalls with nanometer root-mean-square (rms) surface roughness. Profile testing results show that the dimensional errors of the mold are certified to be approximately 1 mu m. Injection molding replication experiment shows that the mold is suitable for the polymer optical waveguide for its simple process and fine surface profile.

• 出版日期2013
• 单位中国人民解放军国防科学技术大学