Nanostructure fabrication on an Al surface by chemical and electrochemical multiprocess and nanoscale molecular patterning on the nanostructured Al surface

作者：Watanabe Y; Kato H^*; Takemura S; Kusama S; Limura G; Sugiyama T; Hiramatsu T; Nanba N; Nishikawa O; Taniguchi M

来源：JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2009, 27(2): 874-881.

DOI：10.1116/1.3098495

A chemical and electrochemical multistage process was conducted on an A1 surface in order to create new types of nanostructures on the Al surface. The multistage processing was a combination of fabrication processes of linked crater and highly oriented line types of nanostructures on an Al surface. At the first stage, a highly oriented line structure was fabricated by treatment with acetone and subsequent anodization. The line separation was estimated approximately 30-40 nm. At the second stage, the nanostructure formed from the first stage was modified by treating with the chemical agent Semiclean and ultrasonic agitation. Dynamic force microscopy measurements showed that a tilted-step structure, or sawtoothed structure, was created from the highly oriented line structure. In the sawtooth structure, nanoscale sawtooth-shaped structures, which were composed of tilted steps, were created over 5 mu m(2) areas and were aligned along the original highly oriented lines. Furthermore, molecular and polymer patterns were created on this unique nanostructure using copper phthalocyanine (CuPc) and polyaniline. The CuPc molecules were deposited on the nanostructure from toluene droplets containing CuPc while aniline monomers were polymerized on the sawtooth structure. In the case of CuPc deposition, a nanoscale pattern was created along the original sawtooth structure. In the case of polyaniline deposition resulted in a lot of grain-shaped polyaniline structures were grown on the tilted steps while a large tree-shaped polyaniline fiber was found crossing the tilted steps.

• 出版日期2009-4