Mirror control with strain feedback and charge drive for high-performance of scanning probe microscope positioners

作者：Zhang Jie; Zhang Liansheng; Liu Yongbin; Feng Zhihua^*

来源：Sensors and Actuators A: Physical , 2014, 214: 134-141.

DOI：10.1016/j.sna.2014.04.030

• Piezoelectric actuators
• Mirror control
• Strain feedback
• Charge drive
• AFM

An integrated control method based on mirror control with strain feedback and charge drive for piezoelectric actuators is presented in this paper. For mirror control, a target actuator is indirectly controlled and supposed to function simultaneously with a reference actuator. Based on this, a basic charge drive with good linearity and high resolution at high frequencies gains the ability to drive grounded load and output high voltages. Strain feedback is adopted to guarantee the low-frequency characteristic of the control system. This paper describes the integrated control method in detail. The experimental results demonstrated that high linearity, low hysteresis and good low-frequency response were achieved. The technique was also successfully implemented on a commercial atomic force microscopy for low-distortion scanning images.

• 出版日期2014-8-1
• 单位中国科学技术大学