Annealing effects in silicon implanted with helium

作者：Li Bingsheng^*; Zhang Chonghong; Zhou Lihong; Yang Yitao; Zhang Honghua

来源：Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms , 2008, 266(24): 5112-5115.

DOI：10.1016/j.nimb.2008.09.016

• Atomic force microscopy
• Raman spectroscopy
• Surface morphology
• Implantation

Silicon samples were implanted with helium and analyzed by atomic force microscopy (AFM) and Raman spectroscopy before and after annealing in the range of 523-1273 K. After annealing at 523 K, the amorphous area induced by He-ion implantation at room temperature was partially recovered and grain sizes became larger. The surface morphology was analyzed through AFM measurements and it was observed that root mean square of the surface roughness alters upwards and then downwards with annealing temperature.

• 出版日期2008-12
• 单位中国科学院近代物理研究所