An Innovative Mechanism to Amplify Testing Force Resolution of Silicon Dioxide Micro Cantilevers

作者：Liu Hsien-Kuang^*; Liao Wei-Chong; Wang Yuan-Ming

来源：Journal of the Chinese Society of Mechanical Engineers, 2018, 39(2): 197-205.

• amplify
• micromechanical testing
• double lever mechanism
• force resolution
• lubricant

A micro cantilever is usually adopted as micro structure for sensors; therefore, the micromechanical testing of the cantilever becomes an important issue. However, due to requirement of intensive devices incorporated in compact 3C products, MEMS devices are likely to evolve as NEMS devices. Some nano scale NEMS devices may need to work with stroke in the range of micro scale. Therefore, to develop a simple testing methodology for NEMS devices that can amplify either force or stroke is important. An innovative double lever mechanism is proposed to mount on the micro force testing machine in order to increase force measurement resolution for silicon dioxide micro cantilevers with film thickness only 1 mu m, and achieve their valid strength and Young modulus data. Design of this double lever mechanism is based on the law of the lever using an asymmetrical lever. Two sets of asymmetrical levers with four pivot joints are combined, and bearings as well as various lubricants are applied at joints in order to minimize friction and evaluate force amplification ratio. Three kinds of lubricants with different viscosities at the bearings are found to better increase the accuracy of the mechanism than the counterpart without lubricant.

• 出版日期2018-4