Mathematical simulation of a membrane capacitive compensation pressure transducer

作者:Eikhval'da A I*; Sadkovskaya I V; Eikhval'd T A
来源:Technical Physics Letters, 2016, 42(8): 769-771.
DOI:10.1134/S1063785016080071

摘要

The operation of a membrane capacitive pressure transducer with electrostatic compensation of the membrane deformation has been mathematically simulated. It is shown that the theory describing these instruments is incorrect and the error in measuring pressure by them may be as high as 25-29% of the measured value, which makes them inappropriate for use in pressure metrology.

  • 出版日期2016-8

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