Accelarated Publication Increasing the thin film inductance by using soft magnetic Co92Zr8 as conductor

作者：Li Xi Ling; Chai Guo Zhi; Guo Dang Wei; Gao Bo; Zhang Zheng Mei; Xue De Sheng^*

来源：Microelectronic Engineering, 2009, 86(11): 2290-2292.

DOI：10.1016/j.mee.2009.04.007

• Inductance
• Thin-film inductors
• Soft magnetic material

Planar-type thin-film inductor has been fabricated using Co92Zr8 Soft magnetic thin film with high permeability as conductor. The inductance of the Co92Zr8 inductor is about five times more than that of the Cu inductor at frequency 60 MHz. At the same time, the dissipation of thin-film inductor using Co92Zr8 is similar with that of the Cu inductor. This result presents a novel method for increasing the inductance of thin-film inductor with simple technical process.

• 出版日期2009-11
• 单位兰州大学