Angular dependence of plasma parameters and film properties during high power impulse magnetron sputtering for deposition of Ti and TiO2 layers

作者：Hippler R^*; Hubicka Z; Cada M; Ksirova P; Wulff H; Helm C A; Stranak V

来源：Journal of Applied Physics, 2017, 121(17): 171906.

DOI：10.1063/1.4977823

Angular distribution measurements have been carried out during High Power Impulse Magnetron Sputtering (HiPIMS) of a titanium target and deposition of titanium and titanium oxide films. The HiPIMS system was operated at a repetition frequency f = 100 Hz with a duty cycle of 1%. Langmuir probe diagnostics has been carried out at a distance of 7.5 cm from the target at four different angles with respect to the surface normal of the target. Film properties were investigated by means of SEM, XR, and GIXD, and a dependence of film thickness and crystalline structure on the deposition angle is observed. Published by AIP Publishing.

• 出版日期2017-5-7