Alternative approach in 3D MEMS-IC integration using fluidic self-assembly techniques

作者：Chapuis Y A^*; Debray A; Jalabert L; Fujita H

来源：Journal of Micromechanics and Microengineering, 2009, 19(10): 105002.

DOI：10.1088/0960-1317/19/10/105002

Nowadays, industries are investigating new, original and appropriate solutions to address challenges in 3D MEMS-IC large-scale integration. Self-assembly techniques are among those. We report on an alternative approach inspired from fluidic self-assembly and using the flip-chip method. Here, solder bumps are directly formed onto a MEMS chip using liquid solder solution in a bath. The self-alignment process is operated after surface treatment by plasma deposition to form high and low wettability selective patterns. Finally, MEMS and electronic chips are permanently bonded after low thermal heating without any pressure. Electrical contact is established and electromechanisms of the microsystems are proven. Compared to classic MEMS-IC flip-chip methods, this strategy presents many advantages: it is a low-cost and fast fabrication process requiring no specific equipment for deposition of solder bumps. Furthermore, it can be applied on different substrates and it does not require a specific pressure method during the bonding process. This strategy is also an appropriate fabrication method for large-scale MEMS integration where electronic connection density is high.

• 出版日期2009-10