An equivalent method of multi-beam laser interference lithography for 2D plasmonic crystals fabrication

作者：Liu, Chen^*; Zhang, Cheng; Wang, Hui; Chen, Yikai; Lei, Xinrui; Zhang, Douguo; Lu, Yonghua; Wang, Pei

来源：Journal of Optics, 2015, 17(8): 085001.

DOI：10.1088/2040-8978/17/8/085001

• interference lithography
• sub-wavelength structures
• surface plasmons

We proposed an approach to fabricate two-dimensional (2D) plasmonic crystals based on equivalent multi-beam interference lithography. With a self-designed truncated hexagonal pyramid, three sub-wavelength structures were demonstrated and characterized, and the corresponding simulation was also carried out and well fitting. Further, the plasmonic Bloch waves (PBWs)-mediated fluorescence radiation was investigated and the wavelength-dependent fluorescence directional emission was observed. This work might provide a simple, flexible and low-cost way to achieve complex large-scale plasmonic crystals with nanoscale features for some practical applications, such as surface-enhanced Raman scattering (SERS) substrates, photovoltaic devices and biological chips.

• 出版日期2015-8
• 单位中国科学技术大学