Non-uniform residual stress assembly for free-space optical systems

作者：Johnstone R W; Sameoto D; Parameswaran M^*

来源：Microsystem Technologies, 2012, 18(6): 805-813.

DOI：10.1007/s00542-012-1490-4

When structures fabricated using surface-micromachining contain non-uniform stresses, those structures will deflect vertically during the release step. In this paper, we show how those deflections can be harnessed, and optionally amplified, to assemble out-of-plane components. This method of assembly introduces no new materials or steps into the fabrication process. Structures can be raised to 90A degrees with respect to the substrate, or, with the addition of mechanical interlocks, to any arbitrary angle. In addition to reporting on the assembly of several surface-micromachined optical device using this method, this paper shows a simple free-space optical system. The optical system operates in the plane of the substrate surface, but light is coupled into the system perpendicularly to the substrate surface.

• 出版日期2012-6