A Multiple Phase-Shifted Distributed Feedback (DFB) Laser Fabricated by Nanoimprint Lithography

作者：Zuo Qiang^*; Zhao Jian-Yi; Chen Xin; Wang Zhi-Hao; Sun Tang-You; Zhou Ning; Zhao Yan-Li; Xu Zhi-Mou; Liu Wen

来源：Chinese Physics Letters, 2013, 30(5): 054205.

DOI：10.1088/0256-307X/30/5/054205

Multiple phase-shifted (MPS) diffraction grating is an effective way proposed to overcome the spatial hole burning (SHB) effect in a distributed feedback (DFB) laser. We present two symmetric lambda/8 phase-shifted DFB lasers by using nanoimprint lithography (NIL). The threshold current of a typical laser is less than 15 mA. The side mode suppression ratio (SMSR) is still above 42 dB even at 100mA current injection. To show the versatility of NIL, eight different wavelength MPS-DFB lasers on this single chip are also demonstrated. Our results prove that NIL is a promising tool for fabricating high performance complex grating DFB lasers.

• 出版日期2013-5
• 单位华中科技大学