A MEMS-based air flow sensor with a free-standing micro-cantilever structure

作者：Wang Yu Hsiang^*; Lee Chia Yen; Chiang Che Ming

来源：Sensors, 2007, 7(10): 2389-2401.

DOI：10.3390/s7102389

• flow sensor
• micro-cantilever
• micro-electro-mechanical-system (MEMS)
• residual stress

This paper presents a micro-scale air flow sensor based on a free-standing cantilever structure. In the fabrication process, MEMS techniques are used to deposit a silicon nitride layer on a silicon wafer. A platinum layer is deposited on the silicon nitride layer to form a piezoresistor, and the resulting structure is then etched to create a freestanding micro-cantilever. When an air flow passes over the surface of the cantilever beam, the beam deflects in the downward direction, resulting in a small variation in the resistance of the piezoelectric layer. The air flow velocity is determined by measuring the change in resistance using an external LCR meter. The experimental results indicate that the flow sensor has a high sensitivity (0.0284 Omega/ms(-1)), a high velocity measurement limit (45 ms(-1)) and a rapid response time (0.53 s).

• 出版日期2007-10