科研之友
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摘要
The relationship of AES chemical shift with element valence and electronegativity is discussed. It has also offered Auger electron kinetic energy and chemical shift data of various compounds. Besides, we apply AES chemical shift to study the adsorption of oxygen on zinc. This method can distinguish the states of zinc and oxygen. The interface reaction mechanism of Ti/SiO2 during RTA treatment was explained with this method and the structure of lubrication film can be studied by AES.
- 出版日期1993
- 单位清华大学
