A new piezomagnetic film force sensor model for static and dynamic stress measurements

作者：Lin Qianying; Zhu Zhenghou^*; Chen Jie; Liu Dengyu; Zhao Hui^*

来源：Journal of Magnetism and Magnetic Materials, 2018, 466: 106-111.

DOI：10.1016/j.jmmm.2018.06.073

• Piezomagnetic
• Force sensor
• Static and dynamic

In this study, an Fe73.5Cu1Nb3Si13.5B9 amorphous alloy film was used as a sensing chip for the development of a novel piezomagnetic force sensor model with a closed inductance loop. The sensor exhibits an excellent antiinterference ability against the electromagnetic effects from the environment. Reliable data is obtained at temperatures smaller than 60 degrees C. Furthermore, the piezomagnetic properties of the Fe73.5Cu1Nb3Si13.5B9 films annealed at different conditions were investigated. After annealing at 350-555 degrees C, the elastic hysteresis of the sensing chip was weakened, which is beneficial in dynamic stress measurements. The optimal stress range for static and dynamic measurements is 0-2 kPa, where the sensitivity is 3.5 mu H/kPa. When the annealing temperature is 150 degrees C, the piezomagnetic effect of the film is significant and elastic hysteresis is obvious, which is suitable only for static stress measurements. In the range 0-10 kPa, the force-sensitivity performance curve is linear with a sensitivity of 3 mu H/kPa, which demonstrates its excellent force-sensitivity properties.

• 出版日期2018-11-15
• 单位南昌大学