Fluidic and Electronic Transport in Silicon Nanotube Biosensors

作者：Hibst Nicolas; Steinbach Annina M; Strehle Steffen

来源：MRS Advances, 2016, 1(56): 3761-3766.

DOI：10.1557/adv.2016.330

<jats:title>ABSTRACT</jats:title>
<jats:p>Silicon nanotubes (SiNTs) represent unique building blocks for future nanoscale biosensor devices merging electronic sensing and nanofluidics. Configured as ion-sensitive field effect transistors (ISFETs), SiNTs have great potential for charge sensing or label-free chemical detection in minute sample volumes flowing through their inner cavity. In the present study, doped SiNTs were synthesized from the gas phase in a bottom-up approach. To study their nanofluidic and electronic transport properties, single SiNTs were functionally integrated as ISFETs and coupled to a microfluidic system. The experimental results for ion diffusion through a SiNT are in full agreement with numerical calculations based on Fick's second law if a diffusion coefficient is assumed approximately one order of magnitude smaller than the bulk value.</jats:p>

• 出版日期2016