摘要

Lead zirconate titanate (PZT) is widely used in various electro-mechanical devices because of its piezoelectric function. In some of its applications, the piezo ceramic will be subjected to a DC bias. The applied DC bias will stress the PZT ceramic and can undergo an electrical degradation process. This electrical degradation process demonstrates itself as resistance decreases and leakage current increases. Therefore, the electrical degradation phenomenon can severely impact on device performance and reliability. It has been found that, accompany this electrical breakdown process, black spots will appear in the ceramic body. In this paper, the formation and growth of the black spots in a PZT capacitor under DC bias is investigated. The black spot area is further characterized with various analytical methods. Based on previous research, a multi-breakdown model is proposed for explaining the mechanism of black spot growth.