摘要

Epitaxial lithium tantalate (LiTaO3) thin films were grown on the hexagonal plane of sapphire substrates by metal organic chemical vapor deposition. Two crystallographic variants, related to each other by 180 degrees rotation around the c axis, as well as non-180 degrees domains were determined by transmission electron microscopy from cross-sectional samples of these films. A structural model for the non-180 degrees domain is proposed and the possible formation mechanisms are discussed.