A planar-type surface-wave plasma source with a subwavelength diffraction grating inclusion for large-area plasma applications

作者：Chen Zhaoquan^*; Liu Minghai; Tang Liang; Hu Peng; Hu Xiwei

来源：Journal of Applied Physics, 2009, 106(1): 013314.

DOI：10.1063/1.3168493

• diffraction gratings
• plasma materials processing
• plasma sources
• polaritons
• surface electromagnetic waves
• surface plasmons

The electromagnetic wave through the subwavelength diffraction grating can be largely absorbed by surface-wave plasmas (SWPs). A SWP source is built with two slot-array antennas element. Due to the dissipation of surface waves in overdense plasmas, this source can provide remarkable discharge efficiency of 4.4 cm(2)/W experimentally and 96% of incident power numerically. When the applied power as low as 200 W is supplied to the SWP source, a homogeneous plasma with the uniform area up to 14x36 cm(2) and the plasma density up to 1.04x10(18) m(-3) is generated under the quartz slab. By varying the incident power and gas pressure, the parameter of plasmas can be easily controlled without density jumping. Moreover, the characters of bi-Maxwellian electron energy distribution prove that our SWP source yield plasmas by surface heating actually. These excellent performances make the proposed source meet the requirements in large-area plasma processing and also give its advices for plasmas heating in next meter-size SWP sources.

• 出版日期2009-7-1
• 单位华中科技大学