Understanding helicon plasmas

作者：Tarey R D^*; Sahu B B; Ganguli A

来源：Physics of Plasmas, 2012, 19(7): 073520.

DOI：10.1063/1.4739779

This paper presents a comprehensive overview of work on the helicon plasmas and also discusses various aspects of RF power deposition in such plasmas. Some of the work presented here is a review of earlier work on theoretical [A. Ganguli et al., Phys. Plasmas 14, 113503 (2007)] and experimental [A. Ganguli et al., Plasma Sources Sci. Technol. 20(1), 015021 (2011)1 investigations on helicon plasmas in a conducting cylindrical waveguide for m = -1 mode. This work also presents an approach to investigate the mechanisms by which the helicon and associated Trivelpiece-Gould (TG) waves are responsible for RF power deposition in Helicon discharges. Experiment design adopts the recent theory of damping and absorption of Helicon modes in conducting waveguides [A. Ganguli et al., Phys. Plasmas 14, 113503 (2007)]. The effort has also been made to detect the warm electrons, which are necessary for ionization, because Helicon discharges are of high density, low T-c discharges and the tail of the bulk electron population may not have sufficient high-energy electrons. Experimental set up also comprises of the mirror magnetic field. Measurements using RF compensated Langmuir probes [A. Ganguli et al., Plasma Sources Sci. Technol. 17, 015003 (2008)], B-dot probe and computations based on the theory shows that the warm electrons at low pressure (0.2-0.3 mTorr) Helicon discharges, are because of the Landau damping of TO waves. In collisional environment, at a pressure approximate to 10 mTorr, these high-energy electrons are due to the acceleration of bulk electrons from the neighboring regions across steep potential gradients possibly by the formation of double layers.

• 出版日期2012-7