Non-equilibrium kinetics in N-2 discharges and post-discharges: a full picture by modelling and impact on the applications

作者：Loureiro J^*; Guerra V; Sa P A; Pintassilgo C D; Lino da Silva M

来源：Plasma Sources Science and Technology, 2011, 20(2): 024007.

DOI：10.1088/0963-0252/20/2/024007

The main concerns associated with the establishment of a self-consistent model for N-2 discharges and post-discharges at low pressures (typically p similar to 1 Torr), as well as in mixtures of this gas with O-2 and CH4 are analysed and discussed. The focus is given on the coupling of the various kinetics involved: electrons, vibrational molecules N-2(X (1)Sigma(+)(g), nu), dissociated atoms N(S-4), ionic species, and various atomic and molecular electronic states. The impact of N-2-O-2 and N-2-CH4 systems on the applications is briefly summarized by reviewing the essential kinetics. The difficulty in incorporating a self-consistent model for the surface kinetics is also discussed and a state-of-the-art approach for wall reactions is presented.

• 出版日期2011-4