Dual-Mode Resonator and Switchless Reconfigurable Oscillator Based on Piezoelectric AlN MEMS Technology

作者：Zuo Chengjie^*; Van der Spiegel Jan; Piazza Gianluca

来源：IEEE Transactions on Electron Devices, 2011, 58(10): 3599-3603.

DOI：10.1109/TED.2011.2162413

• Aluminum nitride (AlN)
• complementary metal-oxide-semiconductor (CMOS)
• dual frequency
• dual mode
• microelectromechanical systems (MEMS)
• oscillator
• piezoelectric
• reconfigurable
• resonator
• switchless

For the first time, this work demonstrates a switchless dual-frequency (472 MHz and 1.94 GHz) reconfigurable CMOS oscillator using a single piezoelectric AlN microelectromechanical-systems resonator with coexisting S0 and S1 Lamb-wave modes of vibration. High performance (high quality factor Q and electromechanical coupling factor kappa(2)(t) for a resonator and low phase noise for an oscillator) has been achieved for both the resonator and oscillator in terms of dual-mode operation. In particular, 1.94-GHz operation has the best phase noise performance at 1-MHz offset when compared with all previously reported CMOS oscillators that work at a similar frequency.

• 出版日期2011-10