Application of plasma modified multi-wall carbon nanotubes to ethanol vapor detection

作者：Liu Chun Kuo; Wu Jyh Ming; Shih Han C^*

来源：Sensors and Actuators B: Chemical , 2010, 150(2): 641-648.

DOI：10.1016/j.snb.2010.08.026

• Multi-wall carbon nanotubes (MWCNTs)
• Chemical vapor deposition (CVD)
• Microwave plasma enhanced chemical vapor deposition (MPECVD)
• Surface modification
• Ethanol
• Gas sensor

The purified multi-wall carbon nanotubes (MWCNTs) obtained by a nitric acid (4N) treatment after a chemical vapor deposition were treated by oxygen or fluorine plasma for surface modification The plasma modified MWCNTs were manufactured by microwave plasma enhanced chemical vapor deposition and were developed as novel gas sensor materials In gas-sensing tests the MWCNT-based gas sensors have shown a p-type response with resistance enhancement upon exposure to 50-500 ppm ethanol at room temperature Oxygen plasma modification can increase the sensor response from 1 03 to 1 16 on process duration of 30 s due to the apparent elimination of amorphous carbon as demonstrated by Raman results However oxygen plasma modification has no effective assistance in decreasing the response and recovery time By applying fluorine plasma modification the sensor response increases from 1 03 to 1 13 on process duration of 60 s but the response and recovery time can decrease apparently from 225 to 95 s and 452 to 227 s due to the existence of numerous fluorine-included functional groups as demonstrated by the results of X-ray photoelectron spectroscopy The sensitivity increases three more times (from 0 0003 to 0 0011) and the linear range of measurement can

• 出版日期2010-10-28
• 单位清华大学