A flexible PDMS capacitive tactile sensor with adjustable measurement range for plantar pressure measurement

作者：Lei Kin Fong^*; Lee Kun Fei; Lee Ming Yih

来源：Microsystem Technologies, 2014, 20(7): 1351-1358.

DOI：10.1007/s00542-013-1918-5

A flexible capacitive tactile sensor with adjustable characteristics, i.e., measurement range and sensitivity, has been developed. The proposed sensor is designed for large pressure measurement; therefore, polydimethylsiloxane (PDMS) material is selected as the material of the dielectric layer between the parallel plate electrodes of the sensor. Since the elasticity of the PDMS material can be adjusted by the mixing ratio of PDMS pre-polymer and curing agent during formation, sensors in different measurement ranges, i.e., 240-1,000 and 400-3,000 kPa, and corresponding sensitivities, i.e., 2.24 and 0.28 %/MPa, were respectively constructed and demonstrated. These measurement ranges are suitable for most of the biomechanical applications, especially for plantar pressure measurement. Moreover, because the output of the sensor, i.e., capacitance, is highly influenced by the dimension of the sensor structure, each sensor consists of four independent capacitance elements. The output of each sensor is averaged by four capacitances for single force measurement. This could improve the measurement accuracy in practical situation. Also, linearity of the measurement response could be enhanced and it was shown by the R-squared values in two measurement ranges, i.e., 0.9751 and 0.9881, respectively. The proposed sensor is flexible and miniaturized and has the potential to be applied to biomechanical applications.

• 出版日期2014-7
• 单位河北医科大学; 长春大学