Microstructure Evolution of Sputtered Bi-Te Films during Post-Annealing: Phase Transformation and Its Effects on the Thermoelectric Properties

作者：Jeon Seong jae^*; Oh Minsub; Jeon Haseok; Kang Stephen D; Lyeo Ho Ki; Hyun Seungmin; Lee Hoo jeong

来源：Journal of the Electrochemical Society, 2011, 158(8): H808-H813.

DOI：10.1149/1.3598174

This study examined the microstructure evolution of sputtered Bi-Te films during post-annealing. Combining X-ray diffraction (XRD) and transmission electron microscopy (TEM) analyses, we unraveled the fundamental aspects of the materials process: The as-deposited film was not in the Bi(2)Te(3)-type phase but in a metastable phase based on a rock-salt structure. Annealing at an elevated temperature allowed the nucleation and growth of the stable phase from the film of the metastable phase in a typical manner of the heterogeneous phase transformation. In addition, the growth of the stable phase is found accountable for the remarkable improvements of the electrical and thermoelectric properties of the films observed after post-annealing.

• 出版日期2011