Degradation of poly(ethylene glycol-propylene glycol) copolymer and its influences on copper electrodeposition

作者：Choe Seunghoe; Kim Myung Jun; Kim Hoe Chul; Lim Taeho; Park Kyung Ju; Kim Kwang Hwan; Ahn Sang Hyun; Lee Anna; Kim Soo Kil^*; Kim Jae Jeong

来源：Journal of Electroanalytical Chemistry, 2014, 714: 85-91.

DOI：10.1016/j.jelechem.2013.12.023

• Copper electrodeposition
• Additive
• Poly(ethylene glycol-propylene glycol)
• Decomposition
• Cyclic voltammetry stripping

In this work, the degradation of poly(ethylene glycol-propylene glycol) copolymer (PEG-PPG) and its effect on the electrodeposition of Cu were investigated. PEG-PPG became fragmented during the electrodeposition with changing its terminal groups from hydroxyl to aldehyde, formic ester, and ketone. The aged solution showed a higher saturation current density than the fresh solution in chronoamperometry (CA) measurements, resulting from an easier desorption of the cleaved PEG-PPG from the copper surface through the competition with bis-(3-sulfopropyl)-disulfide (SPS). Furthermore, the electrical resistivity of Cu films deposited from the aged solution increased due to a decrease in the grain sizes.

• 出版日期2014-2-1